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Division Biotechnologies

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Produzione Scientifica

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Filters: Author is Carla Minarini and Keyword is Low-pressure chemical vapour deposition (LPCVD)  [Clear All Filters]
2004
In situ excimer laser annealing of low-temperature low-pressure chemical vapour deposition grown polycrystalline silicon: Influence of metal diffusion on the film morphology and on the growth rate, Loreti, S., Santoni A., Lancok J., Menicucci I., Minarini Carla, and Della Sala Dario , Thin Solid Films, Volume 458, Number 1-2, p.1-8, (2004)